Ellipsometry Analysis via Parameter Variation Analyzer
Abstract
This tutorial demonstrates the use of the Parameter Variation Analyzer to calculate important properties from ellipsometric analyses. Its flexibility allows the automatic calculation of results based on variations in wavelength, angle or both. The user can thus be provided with 1D plots representing phase differences and amplitude components over angles of incidence and/or wavelengths.
VirtualLab Fusion Configuration
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VirtualLab Fusion
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Grating Package
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Use Case
Variable Angle Spectroscopic Ellipsometry (VASE) Analysis of a SiO2-Coating
Due to its high sensitivity to small changes in optical parameters, variable angle spectroscopic ellipsometry (VASE) is a commonly applied technology...
Tutorial
Parameter Variation Analyzer
The Parameter Variation Analyzer which enables the analysis of the entire system and further process the data obtained.
Tutorial
Ellipsometry Analyzer
This use case demonstrates the basic principles of ellipsometry and illustrates the use of the built-in ellipsometry analyzer in VirtualLab Fusion.