Imaging of Sub-Wavelength Gratings by Using Vector Beam Illumination

It has been shown that the polarization of light play an important role in the interaction with micro- and nanostructures. For example, different types of vector beams have been employed in microscopy. In this example, a high-NA microscope for imaging of sub-wavelength grating is build up, and the influences from illumination with linear, radial, and azimuthal polarizations is investigated.