Imaging of Grating Patterns Positioned on Each Side of a Wafer
Abstract
Simulating aperiodic structures commonly found in semiconductor testing systems is notoriously challenging: feature sizes of the structures fall between the capabilities of rigorous Maxwell solvers and ray-based solvers. VirtualLab Fusion’s field decomposition technique addresses this by dividing the structure into regular subsections, allowing for individual calculation. Its flexible detection concept then enables light recombination at the detector, allowing for automatic calculation of radiometric quantities like irradiance.
VirtualLab Fusion Configuration
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VirtualLab Fusion
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Grating Package
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Tutorial
Parameter Variation Analyzer
The Parameter Variation Analyzer which enables the analysis of the entire system and further process the data obtained.
Use Case
Optical System for Inspection of Micro-Structured Wafer
A complete wafer inspection system including high-NA focusing effect and light interaction with microstructures is modeled, and the formation of image is demonstrated.