Optical System for Inspection of Micro-Structured Wafer

In semiconductor industry, wafer inspection systems are used to detect defects on a wafer and find their positions. To ensure the image resolution for the microstructures, the inspection system often employs a high-NA objective and works in the UV wavelength range. As an example, a complete wafer inspection system including high-NA focusing effect and light interaction with microstructures is modeled, and the formation of image is demonstrated.