Optical System for Inspection of Micro-Structured Wafer

Abstract


In the semiconductor industry, wafer inspection systems are used to detect defects on a wafer and find their positions. To ensure the necessary image resolution for the microstructures, the inspection system often employs a high-NA objective and works in the UV wavelength range. As an example, a complete wafer inspection system including high-NA focusing and light interaction with microstructures is modeled, and the formation of the image is demonstrated.

VirtualLab Fusion Configuration

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Universal Detector

The Universal Detector is the most versatile tool to evaluate and output any information of an electromagnetic field in VirtualLab Fusion.

Tutorial

Channel Settings for Non-Sequential Tracing

With the flexible channel configuration in VirtualLab Fusion, one can easily control the response of any surface and/or region, to realize the desired model

Use Case

Grating Component for General Optical Systems

This use case introduces the Grating Component in general optical setups, which allows for the inclusion of a wide range of different gratings.