White-Light Michelson Interferometer
Abstract
White-light interferometry is a non-contacting technique for precise measurement of e.g. surface profiles and extremely small movements. With a Michelson interferometer setup, and a Xenon lamp source, the white-light interferometry is demonstrated in VirtualLab Fusion. With the spectral property, i.e. limited coherence length, of the source taken into account, it is shown that interference pattern only appears when the path lengths of both arms are almost the same.
VirtualLab Fusion Configuration
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VirtualLab Fusion