Talbot Images of A Conical Phase Mask

In the conventional Talbot lithography, only one image is employed in the photoactive layer, however two images of the phase mask can be produced in a depth-wise manner with special phase mask. In this example, following the work of I.-H. Lee et al., a phase mask with a layer of cones is modeled in VirtualLab Fusion by using the Fourier modal method (FMM, also known as RCWA). Different Talbot images are detected such that the pillar patterns are in the primary image plane while the hole patterns in the secondary image plane.

• Use Case (PDF)pdf23.10.2021
• Use Case and sample files in VirtualLab Fusion (ZIP)zip23.10.2021