A customized detector is generated to calculate the diffraction efficiencies of a one-dimensional periodic structure, as a function of the incident directions over a user-defined range. From the efficiencies the mean value and the contrast of the diffraction efficiencies can be evaluated within the defined field of view, and can be used to define a merit function for further possible parametric optimization.

• Use Case (PDF)pdf21.01.2019
• Use Case and sample files in VirtualLab Fusion (ZIP)zip21.01.2019