The Fourier modal method (FMM, also known as RCWA) can be used to analyze grating efficiencies rigorously. In VirtualLab Fusion you can setup your grating system, perform the rigorous analysis, and analyze the results in different format (e.g. grating order collection, single values, …). In combination with the Parameter Run you can scan over given parameter space to investigate the performance of the specified structure for different configurations.

• Use Case (PDF)pdf01.04.2019
• Use Case and sample files in VirtualLab Fusion (ZIP)zip01.04.2019