High-NA Pattern Generation by Combining Two Beam Splitter Elements

Non-paraxial and large dots number diffractive beam splitters are of great use for e.g. 3D object detection and recognition. It is typically realized by employing a paraxial and a non-paraxial splitter. The design of both beam splitters can be done by using the iterative Fourier transform algorithm (IFTA). But the non-paraxial beam splitter, due to its small period and pixel size, must be evaluated with rigorous method. By applying Fourier modal method for the non-paraxial beam splitter, the performance of the two splitter system is investigated.