Aberration Effects of a Spherical Wave at the Focal Spot

Abstract


Different types of wavefront aberrations have individual influences on the pattern in focus. It is therefore crucial to be able to investigate these effects in detail, e.g. to evaluate the performance of imaging systems. In VirtualLab Fusion, different wavefront aberrations can be generated, and their effects on the focal spot distribution studied, conveniently. As examples, we select several typical aberrations (spherical, coma, astigmatism, ...), vary their values, and calculate the corresponding focal spot distributions.

VirtualLab Fusion Configuration

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