Mirau interferometry is a well-known technique that allows the measurement of surfaces with an accuracy of up to one hundredth of the wavelength used. To fully investigate and design such a system, a non-sequential simulation approach is helpful because it automatically incorporates the interference effects that arise from the internal reflections.
Therefore, this week we not only present such a device, but also elaborate on the measurement principle by investigating the interference effects of differently shaped etalons.
Simulation of Mirau Interferometer
In this use case, a Mirau interferometer is set up in VirtualLab Fusion, via the nonsequential channel concept. Typical interference fringe patterns are simulated.
We set up optical etalons with both planar and curved surfaces. With the nonsequential field tracing technique, the differences in the interference fringes are investigated.
