Optical Metrology with Interferometry

Optical metrology is an essential technology for precise measurement. For example, it is often used for surface testing and therefore plays an important role in quality control. VirtualLab Fusion can help you build up various types of interferometers and include the different optical surfaces and components of the system, and even alignment mistakes like tilt and shift, in the simulation. Two widely used interferometers – Mach-Zehnder and Fizeau – are demonstrated as examples.

Mach-Zehnder Interferometer

We build up a Mach-Zehnder interferometer in VirtualLab Fusion and demonstrate how the tilt and shift of components affect the interference fringe.

Fizeau Interferometer for Optical Testing

A Fizeau interferometer is set up with the help of non-sequential field tracing technology, and the interference fringes from several different test surfaces are shown.

Download free trial version

Download free trial version