Optical Topography Scanning Interferometry
Scanning interferometry is the technique for performing surface height measurement. By exploiting the low coherence of white light source, interference pattern appears only when the path length difference is within the coherent length. Therefore, it enables precise microscopic measurement. Together with a Xenon lamp, a Michelson interferometer is built up and used to measure a specimen with smoothly varying front surface.
- Use Case (PDF)pdf13.07.2018
- Use Case and sample files in VirtualLab Fusion (ZIP)zip13.07.2018