Interferometry is an important technology for optical metrology. It is widely used for the measurements of e.g. surface profile, defects, mechanical and thermal distortion with high precision. As a typical example, a Mach-Zehnder interferometer with coherent laser source is build up in VirtualLab Fusion, with the help of non-sequential field tracing. It is demonstrated that how the tilt and shift of an optical elements may affect the interference fringe pattern.
- Use Case (PDF)pdf18.05.2019
- Use Case and sample files in VirtualLab Fusion (ZIP)zip18.05.2019