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Mach-Zehnder Interferometer


Interferometry is an important technology for optical metrology. It is widely used for the measurements of e.g. surface profile, defects, mechanical and thermal distortion with high precision. As a typical example, a Mach-Zehnder interferometer with coherent laser source is build up in VirtualLab Fusion, with the help of non-sequential field tracing. It is demonstrated that how the tilt and shift of an optical elements may affect the interference fringe pattern.

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