Interferometry is an important technique for optical metrology. It is widely used for the measurements of e.g. surface profile, defects, mechanical and thermal distortion with high precision. As a typical example, a Mach-Zehnder interferometer with coherent laser source is build up in VirtualLab, and especially it is demonstrated that how the tilt and shift of an optical elements may affect the interference pattern.
- Use Case (PDF)pdf13.07.2018
- Use Case and sample files in VirtualLab Fusion (ZIP)zip13.07.2018