Analysis of CMOS Sensors with Microlens Array

In recent decades, the pixel size of CMOS sensors has scaled down from ~10 µm to ~2 µm or even smaller. By decreasing the pixel size, higher spatial resolution has been achieved. At the same time, it brings into question the functionality of the microlenses sitting on top of each pixel. In this example, we investigate the performance of a CMOS sensor with pixel size equal to or below 2 µm. The rigorous FMM/RCWA is employed for the simulation to check the effectiveness of the microlenses.