Topography Scanning Interferometry and Fabry-Pérot Etalon

[Friday, 04. May 2018]


As one of the most fundamental optical metrology techniques, interferometry has enabled various applications. We present here two examples of topography-scanning interferometry: one for surface-profile measurement, and the other for spectral measurement with a Fabry-Pérot etalon. Thanks to the non-sequential extension, the optical setups for both applications can be easily configured in VirtualLab. The working principles are clearly demonstrated and visualized, and we show how the non-sequential field tracing technique facilitates the fast and accurate analysis of such systems.

Optical Topography Scanning Interferometry

A Michelson interferometer is constructed, with a low-coherence Xenon lamp as the source, for the precise scanning of the surface profile of a given specimen.

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Examination of Sodium D Lines with Etalon

A silica-spaced etalon is set up and employed in the measurement of the sodium D lines, using the non-sequential field tracing technique in VirtualLab Fusion.

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