Optical System for Inspection of Micro-Structured Wafer

Ray tracing and physical optics simulation of an optical system for the inspection of microstructured wafers. Both the dot diagram and EM field (including intensity) are shown at different planes in the system.


  • inclusion of gratings in complex optical systems (also with very high NA)
  • rigorous analysis of grating diffraction efficiencies
  • consideration of directional distribution of incident light

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Use Case and sample files in VirtualLab Fusion (ZIP)



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